Vistec SB3050 series
The Vistec SB3050 series - with a Cell Projection option - is our commitment to semiconductor manufacturing professionals. Designed to meet the challenges of direct patterning down to the 32nm technology node, it features Variable Shape Beam (VSB) technology with vector scan and continuously moving stage principles for throughput optimization.
Our industry proven 300mm design concept has been successfully utilized in more than 10 installations worldwide.
Vistec SB250 series
The Vistec SB250 electron beam lithography system has been designed as a universal and cost-effective tool for both direct write and mask making applications to allow the customers to react quickly to market demands.
Vistec Electron Beam GmbH
Phone: +49 3641 79980
Fax: +49 3641 7998222
Scientech Engineering Corporation (Shanghai)
22A, Suntime International Building, 450 Fushan Road
P. R. China
Phone: +86 21 58200880
Fax: +86 21 58200368
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